FABRICATION AND CHARACTERIZATION OF QUASI-THREE-DIMENSIONAL CAPACITOR STRU

Mumlyakov A.M., Shibalov M.V., Timofeeva E.R., Trofimov I.V., Porokhov N.V., Evlashin S.A., Nekludova P.A., Pershina E.A., Anufriev Y.V., Tagachenkov A.M., Zenova E.V., Tarkhov M.A.

Carbon. 2021. Т. 184. С. 698-705.