ELECTRON BEAM DEPOSITION OF COBALT ON THE SILICON SUBSTRATE: EXPERIMENT AND SIMULATION

L'Vov P.E., Bulyarskiy S.V., Saurov A.N., Terentyev A.I., Svetukhin V.V.

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 2021. Т. 39. № 6. С. 064201.